Breakdown process across micrometer-scale surface gap: Measurement and particle simulation

With the miniaturization of MEMS (micro electromechanical systems) devices, the insulation width and the separation between electrodes in such devices have been accordingly reduced. Consequently, electrical breakdown phenomenon across micrometer-scale gap is of great practical interest for insulation designing of miniaturized devices. In this paper, breakdown process across micrometer-scale surface gap demonstrating actual electronic devices was investigated considering the breakdown characteristics under impulse voltage application and the particle simulation. The result shows that breakdown voltage was independent of electrode materials and gap width. It provides good agreement with simulated one, considering positive feedback of the field emission from the cathode.