Precise Automated Semiconductor Characterization under Ambient Control (PASChAC) – An advanced test bench for high-voltage semiconductor devices

This paper presents our development of a high-voltage probing system. The originality of our design comes from the fact that we choose a different way to automate our system compared to commercial stations. Whereas commercial probing system approach is driven by pad positions and field matrix definition, our solution is based on image processing and transformation matrixes. It helps greatly the user work and it increases the overall reliability. A simple picture of the contact pads is enough to run our system. Manual inputs are limited to electrical parameters, image processing parameters and marking/probing reference points. Image processing allows to select one component family all over the wafer surface. It unlocks automated scan of random component arrangements. This could be helpful…